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Modeling and simulation of the squeeze film effect on the MEMS structures.

Date of Publication:2005-12-01 Hits:

Journal:IEEE, 2005 ASIA-PACIFIC MICROWAVE CONFERENCE PROCEEDINGS
ISSN No.:ISSN: 0-7803-9433-X
Translation or Not:no
Date of Publication:2005-12-01
Indexed by:会议论文

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