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低能量离子束辐照磁控溅射沉积超硬质nc-TiN/nc-Cu纳米复合膜

Date of Publication:2006-09-01 Hits:

Journal:金属学报
ISSN No.:0412-1961
Translation or Not:no
Date of Publication:2006-09-01
Indexed by:期刊论文

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