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Low-temperature Synthesis of Superhard Ti-Si-N Nanocomposite Films

Date of Publication:2005-05-01 Hits:

Journal:Novel Materials Processing by Advanced Electromagnetic Energy Source
ISSN No.:9780080445045
Translation or Not:no
Date of Publication:2005-05-01
Indexed by:会议论文

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Low-temperature Synthesis of Superhard Ti-Si-N Nanocomposite Films