Language : 中文
Weiping Zhang

Paper Publications

Design of Electrostatically Levitated Micromachined Rotational Gyroscope Based on UV-LIGA Technology

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Journal:Proceedings of SPIE-V5641,MEMS/MOEMS Technologies and Applications II,SPIE Vol. 5641

ISSN No.:ISSN: 0277-786X

Translation or Not:no

Date of Publication:2004-11-01

Indexed by:会议论文

Date of Publication:2004-11-01

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