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[31]具有自动复位系统的逐位鉴别可多次试开的MEMS强链
[32]电磁悬浮静电驱动微转动陀螺
[33]永磁介磁组合悬浮转子微陀螺
[34]磁场可控介磁稳定悬浮转子微陀螺
[35]磁电式循环混合器
[36]阵列式多腔压电驱动微混合器
[37]压电驱式微混合芯片
[38]基于双氧水分解的微氧气泵
[39]电磁驱动动力调谐挠性转子微陀螺
[40]软磁吸悬高速旋转刚体微陀螺
[41]高温超导稳悬永磁转子微陀螺
[42]聚合酶链反应生物芯片温度控制方法
[43]基于微机电系统信息安全强链的电脑锁
[44]一种具有单片气动凝胶微阀的微泵
[45]MEMS计算机安全开启装置
total56 3/4
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