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Title:非硅MEMS技术及其应用

Faculty/School:上海交通大学

Publisher:上海交通大学出版社

Place of Publication:上海

School Sign:陈文元，张卫平，陈迪

Type of Works:专著

Publication Design:Local publishing house

Classification of Disciplines:工学

ISBN No.:978-7-313-12525-5

Translated or Not:no

Date of Publication:2015-03-18