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Fabrication and Characteristics of Aluminum Oxide MIM Capacitors with Interconnections using BCB-based MEMs Technology

Date of Publication:2020-09-01 Hits:

Journal:2020 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2020 - Proceedings
ISSN No.:9781728157337
Translation or Not:no
Date of Publication:2020-09-01
Indexed by:会议论文

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Fabrication and Characteristics of Aluminum Oxide MIM Capacitors with Interconnections using BCB-based MEMs Technology