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Structure and properties of Ti–Si–N films prepared by ICP assisted magnetron sputtering

Date of Publication:2005-04-01 Hits:

Journal:Surface and Coatings Technology
ISSN No.:0257-8972
Translation or Not:no
Date of Publication:2005-04-01
Indexed by:期刊论文

Pre One:Low-temperature Synthesis of Superhard Ti-Si-N Nanocomposite Films

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