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High-flux ion irradiation with energy of ~20 eV affecting phase segregation and low-temperature growth of nc-TiN/a-Si3N4 nanocomposite films

Date of Publication:2007-09-01 Hits:

Journal:Journal of vacuum science and technology A
ISSN No.:0734-2101
Translation or Not:no
Date of Publication:2007-09-01
Indexed by:期刊论文

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