High-flux ion irradiation with energy of ~20 eV affecting phase segregation and low-temperature growth of nc-TiN/a-Si3N4 nanocomposite films
发布时间：2020-06-09
发表刊物：Journal of vacuum science and technology A
ISSN号：0734-2101
是否译文：否
发表时间：2007-09-01
论文类型：期刊论文