Design of Electrostatically Levitated Micromachined Rotational Gyroscope Based on UV-LIGA Technology
发布时间：2020-06-09
发表刊物：Proceedings of SPIE-V5641，MEMS/MOEMS Technologies and Applications II,SPIE Vol. 5641
ISSN号：ISSN: 0277-786X
是否译文：否
发表时间：2004-11-01
论文类型：会议论文