Simulation of Levitation Control for A MicromachinedElectrostatically Levitated Gyroscope
发布时间：2020-06-09
发表刊物：Proceedings of the 2009 4th IEEE InternationalConference on Nano/Micro Engineered and Molecular Systems
ISSN号：ISBN: 978-1-4244-4629-2
是否译文：否
发表时间：2009-01-01
论文类型：会议论文