Fabrication and characterization of a multidirectional-sensitive contact-enhanced inertial microswitch with an electrophoretic flexible composite fixed electrode
发布时间：2020-06-12
发表刊物：Journal of Micromechanics and Microengineering
ISSN号：0960-1317
是否译文：否
发表时间：2012-03-01
论文类型：期刊论文