- [1]集成微纳系统的前沿技术,2022-8
- [2]Advanced MEMS/NEMS Fabrication and Sensors,2022-1
- [3]智能传感器系统:新兴技术及其应用,2018-5
- [4]Micro Electro Mechanical Systems(章节第一作者),2017-10
- [5]Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets (章节第一作者),2017-4
- [6]A MEMS Inertial Switch Based on Non-silicon Surface Micromachining Technology,2017-8
- [7]Lab-on-a-tube Surface Micromachining Technology,2017-4
| |
