Design, simulation and characterization of a MEMS inertia switch with flexible CNTs/Cu composite array layer between electrodes for prolonging contact time
发布时间：2020-06-12
发表刊物：Journal of Micromechanics and Microengineering
ISSN号：0960-1317
是否译文：否
发表时间：2015-08-01
论文类型：期刊论文