Design and fabrication of a laterally-driven inertial micro-switch with multi-directional constraint structures for lowering off-axis sensitivity
发布时间：2020-06-12
发表刊物：Journal of Micromechanics and Microengineering
ISSN号：0960-1317
是否译文：否
发表时间：2016-05-01
论文类型：期刊论文