MEMS inertia switch with flexible CNTs/Cu composite array layer between electrodes for prolonging contact time
发布时间：2020-06-12
发表刊物：The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2015)
是否译文：否
发表时间：2015-06-01
论文类型：会议论文