A micro electromagnetically-driven scanner by 2-DOF second-order resonance to extend scanning scale for ultra-thin single-fiber endoscope application
发布时间：2020-06-12
发表刊物：The 31st IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2018)
ISSN号：1084-6999
是否译文：否
发表时间：2018-01-01
论文类型：会议论文