A novel MEMS inertial switch with a reinforcing rib structure and electrostatic power assist to prolong the contact time
发布时间:2020-05-08
发表刊物:19TH ANNUAL CONFERENCE AND 8TH INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY (CSMNT2017)
ISSN号:1742-6588
是否译文:否
发表时间:2018-03-01
论文类型:会议论文