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静电锁定MEMS惯性振动阈值传感器研究(教育部装备预研联合基金-青年人才)

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Leading Scientist:yangzhuoqing
Classification of Project:自然科学
Project level:国家级
Classification of Disciplines:机械制造工艺与设备
Date of Project Completion:2017-12-01
Date of Project Initiation:2016-01-01

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