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MEMS扭矩传感器芯片研制-2025/10/01
2024/12/17
可穿戴鼻气流仪的研制与应用-2026/12/01
2024/04/23
玻璃通孔金属钨柱填充及电气互连技术开发-2025/01/01
2024/03/03
机器人减速器上应变传感器原位制造技术开发-2023/10/01
2023/02/15
21GFA-ZZ01-327-2020/12/01
2022/02/16
19GFA-ZZ07-157-1-2020/12/01
2022/02/16
19GFA-ZZ07-157-2020/12/01
2022/02/16
17GFA-ZZ07-027-1-2018/12/01
2022/02/16
微针葡萄糖传感系统微纳电极设计与加工工艺技术合作项目-2021/12/01
2022/02/16
基于异质集成制造的静电式 MEMS 惯性开关研究-2023/06/01
2022/02/16

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