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Published Books
Advanced MEMS/NEMS Fabrication and Sensors
2023-02-15
智能传感器系统：新兴技术及其应用
2021-06-05
Micro Electro Mechanical Systems（章节第一作者）
2021-06-05
Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets （章节第一作者）
2021-06-05
A MEMS Inertial Switch Based on Non-silicon Surface Micromachining Technology
2020-05-07
Lab-on-a-tube Surface Micromachining Technology
2020-05-07
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