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Scientific Research
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Paper Publications
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Coexistent improvement of thermal and mechanical performance at Si/Cu joint by thickness-controlled Sn-Ag bond layer.Journal of Manufacturing Processes.2023
High-throughput cell trapping in the dentate spiral microfluidic channel.Micromachines.2021
Deep Learning-Assisted Triboelectric Smart Mats for Personnel Comprehensive Monitoring toward Maritime Safety.ACS applied materials & interfaces.2022
Optimization of the Discrete Structure in a Pressure Sensor Based on a Multiple-Contact Mechanism to Improve Sensitivity and Nonlinearity.IEEE Sensors Journal.2021
Ultra-high sensitive micro-chemo-mechanical hydrogen sensor integrated by palladium-based driver and high-performance piezoresistor.International Journal of Hydrogen Energy.2021
Patents
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Published Books
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集成微纳系统的前沿技术
Advanced MEMS/NEMS Fabrication and Sensors
智能传感器系统：新兴技术及其应用
Micro Electro Mechanical Systems（章节第一作者）
Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets （章节第一作者）
Research Projects
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系统控制与采集单元研制-2026-12-01
“一种万向振动阈值传感器及其3D打印制备方法”等？3？项专利产权转让合同-2026-12-01
基于TGV先进封装的有源功能三维集成研究-2027-09-01
高密度玻璃基板 TGV 成型及金属互连工艺研究-2026-09-01
MEMS扭矩传感器芯片研制-2025-10-01
