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Modeling and Characterization of a MEMS G-Sensor with Anti-Stiction Raised Strips for Vibration Monitoring Systems

Date of Publication:2010-11-01 Hits:

Journal:IEEE Sensors
ISSN No.:1930-0395
Translation or Not:no
Date of Publication:2010-11-01
Indexed by:会议论文

Pre One:Analytical model of squeeze film damping for microelectromechanical systems structures with anti-stiction raised strips

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