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Fabrication and characterization of a multidirectional-sensitive contact-enhanced inertial microswitch with an electrophoretic flexible composite fixed electrode

Date of Publication:2012-03-01 Hits:

Journal:Journal of Micromechanics and Microengineering
ISSN No.:0960-1317
Translation or Not:no
Date of Publication:2012-03-01
Indexed by:期刊论文

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