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Flexible implantable micro temperature sensor fabricated on polymer capillary by programmable UV lithography with multilayer alignment for biomedical applications

Date of Publication:2013-07-01 Hits:

Journal:IEEE/ASME Journal of Microelectromechanical Systems
ISSN No.:1057-7157
Translation or Not:no
Date of Publication:2013-07-01
Indexed by:期刊论文

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