A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time
Date of Publication:2016-11-01 Hits:
Journal:Applied Surface Sciences（IF: 4.439）
ISSN No.:0169-4332
Translation or Not:no
Date of Publication:2016-11-01
Indexed by:期刊论文
