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Thermomechanical Reliability Enhancement of High-power MEMS with Movable Structure Based on Implanted Skin Hairs

Date of Publication:2020-06-01 Hits:

Journal:Proceedings - Electronic Components and Technology Conference
ISSN No.:0569-5503
Translation or Not:no
Date of Publication:2020-06-01
Indexed by:会议论文

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Thermomechanical Reliability Enhancement of High-power MEMS with Movable Structure Based on Implanted Skin Hairs