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A micro electromagnetically-driven scanner by 2-DOF second-order resonance to extend scanning scale for ultra-thin single-fiber endoscope application

Date of Publication:2018-04-01 Hits:

Journal:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN No.:1084-6999
Translation or Not:no
Date of Publication:2018-04-01
Indexed by:会议论文

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A micro electromagnetically-driven scanner by 2-DOF second-order resonance to extend scanning scale for ultra-thin single-fiber endoscope application