Micro triple-hot-wire anemometer on small sized glass tube fabricated in 5DOF UV lithography system
发布时间：2020-06-12
发表刊物：The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)
ISSN号：1084-6999
是否译文：否
发表时间：2015-01-01
论文类型：会议论文