A contact-enhanced MEMS inertial switch with electrostatic force assistance and multi-step pulling action for prolonging contact time
发布时间：2020-05-08
发表刊物：Microsystem Technologies-micro-and Nanosystems-information Storage And Processing Systems
ISSN号：0946-7076
是否译文：否
发表时间：2018-07-01
论文类型：期刊论文