Enhanced adhesive strength between SU-8 photoresist and titanium substrate by an improved anodic oxidation method for high aspect-ratio microstructures
发布时间：2020-05-08
发表刊物：Journal Of Micromechanics And Microengineering
ISSN号：0960-1317
是否译文：否
发表时间：2019-04-01
论文类型：期刊论文