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Simulation, fabrication and characterization of an all-metal contact-enhanced triaxial inertial microswitch with low axial disturbance

Date of Publication:2014-12-01 Hits:

Journal:Sensors and Actuators A: Physical （IF: 2.311）
ISSN No.:0924-4247
Translation or Not:no
Date of Publication:2014-12-01
Indexed by:期刊论文

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