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Micro triple-hot-wire anemometer on small sized glass tube fabricated in 5DOF UV lithography system

Date of Publication:2015-01-01 Hits:

Journal:The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)
ISSN No.:1084-6999
Translation or Not:no
Date of Publication:2015-01-01
Indexed by:会议论文

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