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Design, simulation and characterization of a MEMS inertia switch with flexible CNTs/Cu composite array layer between electrodes for prolonging contact time

Date of Publication:2015-08-01 Hits:

Journal:Journal of Micromechanics and Microengineering
ISSN No.:0960-1317
Translation or Not:no
Date of Publication:2015-08-01
Indexed by:期刊论文

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