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Design and fabrication of a laterally-driven inertial micro-switch with multi-directional constraint structures for lowering off-axis sensitivity

Date of Publication:2016-05-01 Hits:

Journal:Journal of Micromechanics and Microengineering
ISSN No.:0960-1317
Translation or Not:no
Date of Publication:2016-05-01
Indexed by:期刊论文

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