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Dynamic simulation analysis of off-axis sensitivity in a laterally-driven MEMS inertia switch

Date of Publication:2016-05-01 Hits:

Journal:International Symposium on Advances in Electrical, Electronics and Computer Engineering (ISAEECE)
ISSN No.:2352-5401
Translation or Not:no
Date of Publication:2016-05-01
Indexed by:会议论文

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Dynamic simulation analysis of off-axis sensitivity in a laterally-driven MEMS inertia switch