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A Customized Nonlinear Micro-Flexure for Extending the Stable Travel Range of MEMS Electrostatic Actuator

Date of Publication:2019-04-01 Hits:

Journal:Journal Of Microelectromechanical Systems
ISSN No.:1057-7157
Translation or Not:no
Date of Publication:2019-04-01
Indexed by:期刊论文

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