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Enhanced adhesive strength between SU-8 photoresist and titanium substrate by an improved anodic oxidation method for high aspect-ratio microstructures

Date of Publication:2019-04-01 Hits:

Journal:Journal Of Micromechanics And Microengineering
ISSN No.:0960-1317
Translation or Not:no
Date of Publication:2019-04-01
Indexed by:期刊论文

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