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A contact-enhanced MEMS inertial switch with electrostatic force assistance and multi-step pulling action for prolonging contact time

Date of Publication:2018-07-01 Hits:

Journal:Microsystem Technologies-micro-and Nanosystems-information Storage And Processing Systems
ISSN No.:0946-7076
Translation or Not:no
Date of Publication:2018-07-01
Indexed by:期刊论文

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