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A laterally driven MEMS inertial switch with double-layer suspended springs for improving single-axis sensitivity

Date of Publication:2018-08-01 Hits:

Journal:IEEE Transactions on Components, Packaging and Manufacturing Technology
ISSN No.: 2156-3950
Translation or Not:no
Date of Publication:2018-08-01
Indexed by:期刊论文

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A laterally driven MEMS inertial switch with double-layer suspended springs for improving single-axis sensitivity