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Fabrication of High Aspect-Ratio Microstructure on Improved Titanium Substrate with Excellent Adhesive Strength and SU-8 Photoresist

Date of Publication:2019-06-01 Hits:

Journal:2019 20th International Conference On Solid-state Sensors, Actuators And Microsystems And Eurosensors Xxxiii, Transducers 2019 And Eurosensors Xxxiii
Translation or Not:no
Date of Publication:2019-06-01
Indexed by:会议论文

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Fabrication of High Aspect-Ratio Microstructure on Improved Titanium Substrate with Excellent Adhesive Strength and SU-8 Photoresist