Journal:Ceramics International ISSN No.:0272-8842 Translation or Not:no Date of Publication:2019-07-01 Indexed by:期刊论文
Pre One:A Heterogeneous Integrated MEMS Inertial Switch With Compliant Cantilevers Fixed Electrode and Electrostatic Locking to Realize Stable On-State
Next One:Fabrication of High Aspect-Ratio Microstructure on Improved Titanium Substrate with Excellent Adhesive Strength and SU-8 Photoresist