上海交大研究生院主页平台管理系统 yangzhuoqing--Home-- A Heterogeneous Integrated MEMS Inertial Switch With Compliant Cantilevers Fixed Electrode and Electrostatic Locking to Realize Stable On-State

A Heterogeneous Integrated MEMS Inertial Switch With Compliant Cantilevers Fixed Electrode and Electrostatic Locking to Realize Stable On-State

Date of Publication:2019-09-01 Hits:

Journal:IEEE Journal of Microelectromechanical Systems
ISSN No.:1057-7157
Translation or Not:no
Date of Publication:2019-09-01
Indexed by:期刊论文