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A Laterally Driven MEMS Inertial Switch With Double-Layer Suspended Springs for Improving Single-Axis Sensitivity

Date of Publication:2018-10-01 Hits:

Journal:IEEE Transactions On Components Packaging And Manufacturing Technology
ISSN No.:2156-3950
Translation or Not:no
Date of Publication:2018-10-01
Indexed by:期刊论文

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A Laterally Driven MEMS Inertial Switch With Double-Layer Suspended Springs for Improving Single-Axis Sensitivity